Tube Diameter : 285Phi(Quartz)
Tube Length : 2.5m
Heater Zone : 6 ~ 7Zone
Loading Capa. : ,7.5kg
Full Automation(Program control)
Purification Division
High vacuum pump : Diffusion pump 22inch
Large size By-pass valve
Convenience system of glove box for collect
“D” Company – 10 units
Jilin OLED – 3units(Without glove box)

Tube Diameter : 285phi(Quartz)
Acquisition of C.E
Expert to Merck(Germany)
Electrical cabinet, Monitor cabinet
Two Hand Control
285phi
Purification Division
Protection of 3units Heater Over Temp.
ATM sensor, Flow sensor, Pressure sensor
Best Safety function
Time control By-pass valve(3units)